技术参数：

紫外激光光束分析仪(UV - Laser Beam Profiler) 

可用于准分子激光器和 Nd：YAG  激光器的高次谐波

相机系统：
• 高动态范围

• 高分辨率紫外转换器
• Homogeneity up to > 98 % over active area
• 延迟时间短

• 损伤阈值高达15 J/cm²
• 单脉冲探测频率达1 KHz(由转换器的延迟时间决定)

 

Laser	Wavelength	beam size
F2	157 nm
ArF	153 nm
NdYag 5th	213 nm	< 1mm	< 5x4	< 9x6	< 13x9	< 18x13	< 27x20	<35x27	<43x32	< 50x38*
KrF	248 nm	Laser spot
NdYag 4th	266 nm
XeCI	308 nm	ML5222 10x	direct	ML5201	ML5202	ML5203	ML5204	ML5205	ML5206	ML5207
XeF	351 nm	ML5223 20x
NdYag 3rd	355 nm	ML5224 40x

* (larger sizes available on request, up to 200 mm

Software	ML1201	beamlux II advanced
Camera	ML3720	1/2” CCD      782 x 582
	ML3743	2/3” CCD      1392 x 1040

主要特点：

Features

• 可测量所有的准分子激光器
• 在线质量控制
• real time evaluation of the laser with 1/10th of a second

• Synchronizes up to three cameras simultaneously for measurement of raw beam and processing plane

• TCP/IP remote control to control your laser system from your desk