产品描述
RF-340 系列匹配网络自动整合装置
和产生等离子体的13.56MHz高频电源组合，与负载进行匹配的自动调整装置 (匹配箱 + 控制器) 。
Features特点
RF-340 series Matching Network
An automatic matching device to match the load to the 13.56 MHz RF power supply for plasma generation. Matching box + Controller
Functions功能
Preset (8 point)
Records the settings of each of the variable capacitors for the points that have been matched.
Auto-preset
Auto control driving the variable capacitors to the preset settings when output is zero, and then outputting the RF
Auto-delay
No immediate reaction to sudden changes in the load, such as arcing, with automatic operation after a specified period of time has elapsed.
Variable capacitor position display
Variable capacitor drive range setting
Control of the variable capacitor drive range setting during automatic operation
Vdc display
Vdc meter relay
Vdc stabilization control
Vpp display
Vpp meter relay
Load impedance display
When matching is obtained, the plasma impedance is calculated and displayed
CE compliant （excluding some devices）
技术规格：
| Matching box匹配箱 | ||||
| RF-34021 | RF-34031 | RF-34041 | ||
| Permitted transmitted power | 1.5kW | 3kW | 6kW | |
| Input connector | N type | LS2 type | ||
| Frequency | 13.56MHz | |||
| Input impedance | 50 Ω | |||
| Fan power supply | DC 24V (supplied from the controller) | |||
| Matching control | Vacuum variable capacitor | |||
| Tuning control | Vacuum variable capacitor | |||
| Residual reflected power | Within 10% of the input power | |||
| Cooling method | Water (2～3L/min) | Water (2.5～3L/min) | ||
| Dimensions (mm) | Width | 370 | 470 | |
| Depth | 300 | 370 | ||
| Height | 205 | 246 | ||
| Mass (kg) | 15 | 19 | ||
| Controller | ||||
| Input power | DC 24V, 4A ( to be provided separately ) | |||
| Dimensions (mm) | 140 (W) × 305 (D) × 145 (H) | |||
| Control method | Digital control | |||
| Mass | 1.5kg | |||
