Thermal Desorption Spectrometer
This is a basic surface science tool that enables the researcher to obtain quantitative
information on chemical species which desorb from the sample when heated. Typical
temperature ranges are room temperature to 1200K.
The basic spectrometer consists of a Thermal Desorption Spectroscopy (TDS) tool that
can be attached to any vacuum chamber. It detects the desorbing mass signal from the
sample and uses a specially shielded mass spectrometer and control software to obtain
high sensitivity data of mass signal versus sample temperature. The tool also contains the
power supply to drive the sample heater and monitor sample temperature. We can supply
a sample holder and heater or the customer may supply his own.
Supporting Vacuum System – We has supplied major semiconductor companies with a
complete system tool as described below. The system can also be supplied for basic
surface science and catalysis research.
1. Thermal Desorption Chamber with ion gauge
2. 250 L/S turbo pump with dry backing pump
3. XYZR Sample Manipulator
4. 1-200 amu Quadrupole mass spectrometer with shield and motion control
5. Transferable sample holder and heater for up to 1.00 x 1.00 inch sample size
6. Load lock and specimen transfer system with 70 L/S turbo pump
7. Gas Manifold system for up to 3 gases with mechanical pump, gauge, leak valve
8. System integration includes bake out system, stainless steel support framework,
Electronics racks, safety interlocks
9. Temperature control and Data system with integrated mass spectra vs. temperature
output, time
10. Titanium sublimation pump
11. Optional analysis chamber, manipulator and 250 L/S ion pump