XLS系列线性位移平台,是由超声波压电马达驱动,可提供不同行程的精确定位。由于采用超声波压电马达驱动,速度可达到200mm/s,并且该平台适用于扫描,可提供恒定的扫描速度,速度不稳定性低于2%。
该平台采用超声波马达,对于这种马达平台的运动是通过接触点的椭圆振荡产生。如下图所示。通过椭圆的振荡推动平台产生微小移动,并通过高频率产生极高的速度,并且没有噪声,电机在定位后可产生自锁,由于马达在椭圆振荡的上端才会与平台接触,大大提高平台的使用寿命通常在10-100km。
XLS系列平台可提供不同的行程,行程范围可达到92mm。为了适应不同精度要求的应用,平台集成不同精度的位置传感器,根据闭环系统中传感器的精度可分为以下几类线性平台
1)集成-1250位置传感器的压电马达平台-min setp1250nm,
XLS-1-40 | XLS-1-50 | XLS-1-60 | XLS-1-70 | XLS-1-80 | XLS-1-100 | XLS-1-120 | |
travel range | 27mm | 32 | 37 | 42 | 50 | 72 | 92 |
resolution | 1250nm | ||||||
unidirectional repeatability | ±1250nm | ||||||
bidirectional repeatability | ±2500nm | ||||||
load capacity | 0.5kg | ||||||
holding force | 1N | ||||||
driving force | 1N | ||||||
max. speed | 200mm/s | ||||||
min. speed | 2 to 5mm/s | ||||||
cable length | 1.5m |
2)集成-312位置传感器的压电马达平台-min setp350nm
XLS-1-40 | XLS-1-50 | XLS-1-60 | XLS-1-70 | XLS-1-80 | XLS-1-100 | XLS-1-120 | |
travel range | 27mm | 32 | 37 | 42 | 50 | 72 | 92 |
resolution | 350nm | ||||||
unidirectional repeatability | ±350nm | ||||||
bidirectional repeatability | ±700nm | ||||||
load capacity | 0.5kg | ||||||
holding force | 1N | ||||||
driving force | 11N | ||||||
max. speed | 200mm/s | ||||||
min. speed | 2 to 5mm/s | ||||||
cable length | 1.5m |
3) 集成-78位置传感器的压电马达平台-min setp80nm
XLS-1-40 | XLS-1-50 | XLS-1-60 | XLS-1-70 | XLS-1-80 | XLS-1-100 | XLS-1-120 | |
travel range | 27mm | 32 | 37 | 42 | 50 | 72 | 92 |
resolution | 80nm | ||||||
unidirectional repeatability | ±80nm | ||||||
bidirectional repeatability | ±160nm | ||||||
load capacity | 0.5kg | ||||||
holding force | 1N | ||||||
driving force | 1N | ||||||
max. speed | 200mm/s | ||||||
min. speed | 2 to 5mm/s | ||||||
cable length | 1.5m |
4) 集成-1位置传感器的压电马达平台-min setp25nm