RF-120系列高频电源
是溅射、刻蚀、CVD、离子镀等薄膜制备/加工使用的、用于生成等离子体的13.56MHz高频电源(RF电源)。
特性:
A high-frequency power supply (RF power supply) creating 13.56 MHz plasma for thin-film processing and etching, including sputtering, etching, CVD, and ion plating.
The RF-120 series includes DeviceNet, RS232C, and analog interfaces as standard. These are multi-functional powers supplies that offer performance like pattern operation, arcing cut/count functions, and recall of past data. There is also a matching network to facilitate the combination of each power supply and connected device.
功能:
Pattern operation
Automatic output control based on output and time data preset in the RF power supply
Up to 3 patterns with a maximum of 5 points per pattern can be set
Arcing cut
Arcing count
Counts the number of times that arcing occurs, and halts output when a preset number is reached
Pulse operation (option)
Pulse frequency: 100 Hz ~ 10 kHz, duty: 20 ~ 80%
*A pulse-generator must be purchased separately
Synchronous operation
Can be connected to other RF power supplies and operated synchronously
Slow-start / Slow down
Reflectance limit continuation control
When the reflected power limiter is triggered, the elapsed time is measured and when the specified amount of time is reached, output is halted
Past data memory
When an abnormality occurs, the internal data from the prior 30 seconds is output
Matching completion confirmation
When the reflected power is less than the specified value, a confirmation signal is output
Arcing cut operation confirmation
Limiter operation confirmation
Incident/ Reflected power monitor output
Input power supply confirmation
RF output confirmation
Error check signal output
Various interfaces supported as standard
DeviceNet, RS232C, analo
CE mark compliant (excluding some devices)
选项功能
Manual operation board (RF-56000)
Out-of-phase signal generator (Phase Shifter)
Water-cooled input terminal (for ion plating)
应用案例
产品规格:
RF-12010 | RF-12020 | RF-12030 | RF-12040 | ||
zei大输出功率 | 750W | 1.5kW | 3kW | 6kW | |
输出接头 | N 型 | LS2 型 | |||
输入电压 | AC 200V ±10V, 三相, 50/60 Hz | ||||
输入电流 | AC 5A | AC 8A | AC 20A | AC 35A | |
振荡方式 | 他激式晶体振荡 | ||||
振荡频率 | 13.56MHz ±0.005% | ||||
输出稳定度 | ±0.5%以下 (zei大输出功率, 对50Ω电阻负载) | ||||
波动 | 1%以下 (zei大输出功率, 对50Ω电阻负载) | ||||
总谐波失真 | - 50dB (zei大输出功率时) | ||||
制冷方式 | 强制空冷 | 水冷 | |||
5~7L/分 | 5~6.5L/分 | ||||
外观尺寸 (mm) | Wide | 481 | 481 | 481 | 481 |
Depth | 430 | 504 | 504 | 510 | |
Hight | 149 | 199 | 199 | 349 | |
重量(kg) | 18 | 25 | 27 | 55 |
*RF-12040由单元1(149mmH/25kg)和单元2(199mmH/30kg)构成。
*外观尺寸不包括突起部分(背面的风扇等)。RF-56000 外观尺寸 : 105mm(W)×305mm(D)×145mm(H)