产品描述
简单介绍： 美国精量电子MEAS超声波液位计SL-700,The Model SL-700 Series Ultrasonic Micromeasurement System is an ideal solution for the detection and measurement of ultra pure chemical fluids in the semiconductor 详情介绍：
DESCRIPTION |
The Model SL-700 Series Ultrasonic Micromeasurement System is an ideal solution for the detection and measurement of ultra pure chemical fluids in the semiconductor industries using very small sensor (VSS) technology. Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-700 Series provides a continuous transmitter with a very high degree of precision. The SL-700 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors.
• 316 LSS machine body sensor | • Semiconductor industries |
• Sensor material finish 10µin RA electropolished | |
• Miniature sensor size reduces liquid volume displacement • Works with the following chemicals independent | |
of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA • High pressure vessel application up to 250 | |
PSIG (1724 Kpa) (consult factory for higher pressure applications) | |
• Accuracy of continuous level transmitter ±0.01 in (0.25 mm) or better • Continuous transmitter output, 4-20 mA, 1-10 V, | |
RS-232, remote unit with digital display, two alarm |
美国精量电子MEAS超声波液位计SL-700
Parameter | Typical Value |
Repeatability | ±0.005 in (0.127 mm) typical |
Input Power | VDC, 115 VAC/230VAC, 50/60 Hz (optional) |
Output | Continuous 4-20 mA. 0-5 V or 0-10 V, RS 232 PC compatible, bidirectional communication, two alarm |
Housing | NEMA 1; NEMA-4X (stainless steel) optional |
Range | to 10 in (25.4 to 254 mm) (consult factory for longer range |
Parameter | Typical Value |
Mounting | ¾’ M VCR, ¾” F VCR |
Sensor Material | LSS (standard) |
Operating Pressure | Up to 250 PSIG (1724 Kpa) |
Temperature | Sensor: -20 to 200 °F (-29 to 93 °C) Electronics: -20 to 170 °F (-29 to 77 °C) |
