Product Description

The Nano-MET10 and Nano-MET20 are compact, single axis nanopositioning systems with exceptional resonant frequency and low noise characteristics. The Nano-MET10 and Nano-MET20 have picometer positioning resolution. Internal position sensors utilizing proprietary PicoQ^® technology provide absolute, repeatable position measurement under closed loop control.

The low noise characteristics and high resonant frequencies make it ideal for demanding metrology applications that require noise floors less than 10 picometers and high speed performance. Related products include the Nano-METZ, Nano-MET2 and Nano- MET3 nanopositioning systems.

Technical Specifications
Range of motion (Nano-MET10)	10 μm
Range of motion (Nano-MET20)	20 μm
Resolution (Nano-MET10)	0.01 nm
Resolution (Nano-MET20)	0.02 nm
Resonant Frequency	4.6 kHz
Recommended max. load (horizontal)*	100 g
Recommended max. load (vertical)*	100 g
Body Material	Aluminum
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.