产品名称: | Al2O3+Si薄膜(SOS)进口料(大尺寸Silicon-on-Sapphire) |
常规尺寸: | dia100;单抛
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技术参数: | Si晶向:<100> Si掺杂类型:本征;不掺杂 Si厚度:0.6um +/- 0.06 um Si电阻率:> 100 ohm.cm Al2O3基片:R plane with single flat Al2O3尺寸:dia100 x 0.53 mm 平面度(flatness):10um 平行性(Parallelism):20um 抛光情况:单抛Projected C-Axis: 45 degree +/- 2 degree 备注:可按照客户要求在C plane Al2O3上镀Si |