卷对卷柔性薄膜沉积设备

Cassette houses flexible material

卷筒用于装载柔性衬底材料

Cassette transported from one process chamber to another via a robotic handler

制备薄膜时，卷筒可由真空机器手从一个腔室输送至另一个腔室

Advantages 此沉积系统的优点

- Eliminates cross-contamination 在制备多层膜器件时消除了交互掺杂影响

- Flexibility to adjust parameters on any part of the process. 制备薄膜时，能灵活控制各种运转沉积参数

- Down time reduced, i.e. each chamber can be serviced independently 因每个腔室可单独维护，减少了停机非运转时间

Reel to Reel Cassette Cluster tools

Cluster tool w/ 8 port locations

具有8个腔室的团簇型沉积系统

15cm and 30cm webwidth

柔性衬底的宽度可从15cm至30cm

Computer controlled

可完全由电脑程序控制操作运行

PECVD, HWCVD and Sputter capability

制备方式包括等离子体和热丝化学气相沉积，及溅射

(US patent #6,258,408B1)

（本产品获美国专利#6,258,408B1）