Dektak XTL Stylus Profiler System

Bruker  new Dektak XTL stylus profiler accommodates samples up to 350mm x 350mm, bringing legendary Dektak^@repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features a small footprint with pneumatic passive isolation and a fully enclosed workstation with a wide, easily accessible interlocking door, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput. Bruker’s exclusive Vision64^@ Production Interface with pattern recognition can be scaled to meet your needs and makes data collection an intuitive and repeatable process, minimizing operator-to-operator variability.

Dektak XTL Delivers

Bruker-Exclusive Dual Camera Control™

• Navigate to points of interest faster by clicking in live video

• Quickly orient sample to be measured by selecting twopoints in the live video (Make Horizontal)

• Simplify measurement setup by point-and-click scan startand end positions in live video (Teach)

Robust Automation Setup and Operation

• Accurately program fiducials and unlimited measurementsites via 300mm, automated encodedXY stage and

360-degree  θ

• Minimize errors utilizing Vision64 Production Interface withpattern recognition

• Program custom user prompts as well as other meta datainto your recipe and store to thedatabase

Easy Analysis and Data Collection

• Easily automate analysis routines using Quick Analyzer,which supports most frequently usedanalyses

• Focus your analysis to report only the features needed oncomplex samples using Step Detection

• Simplify data analysis by giving each measurement siteunique name and automatically log to database

Critical Resultsfor Large-Format Applications

With its unique combination of superiorperformance and ease of use, the Dektak XTLis the new QA/QC and research standardfor industrial thin film deposition monitoringin touch-panel, solar, flatpanel display, andsemiconductor industries.

Wafer Applications:

• Step height for deposited thin films(metals, organics)

• Step height for resists (soft film materials)

• Etching rate determinations

• Chemical mechanical polishing(erosion, dishing, bow)

Large Substrate Applications:

• Printed circuit boards (bumps, step heights)
  

• Window coatings

• Wafer masks

• Wafer chuck coatings

• Polishing pads

Glass Substrate and Display Applications:

• AMOLEDs

• Step height measurements for LCD R&D

• Film thickness measurements for touchpanels

• Thin film measurements for solar coatings

Flexible Electronic Films:

• Organic photodetectors

• Organic films printed on films and glass

• Copper traces for touch screens