表征非晶碳薄膜的厚度和光学常数

应用领域:其他生命科学

检测样品:非晶碳薄膜

检测项目:厚度,光学常数

方案摘要

The UVISEL Spectroscopic Ellipsometer is the ideal tool for reliable film thickness and optical constants characterization of amorphous carbon coatings, even in difficult cases where the film thickness is very thin. Roughness, and interface “adhesion” can also been determined.

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