Characterization of various chalcogenide glasses was performed successfully using the UVISEL NIR Spectroscopic Phase Modulated Ellipsometer. The UVISEL NIR ellipsometer allows the determination of film thickness and optical properties with very high accuracy even where the film is many microns thick, and deposited on a transparent substrate. The versatility of the UVISEL NIR in terms of instrument resolution, sensitivity and step size and the power of the instrument software make the UVISEL NIR the most suitable instrument for determination of these sample structures.