应用领域:电子/电器/半导体
检测样品:纳米级厚度的高k介电材料
检测项目:厚度,光学常数,纳米级尺寸的界面
Optical characterization techniques proved to be complementary to optimize highmaterials used in microelectronic applications.
This note shows that the VUV wavelength range of the UVISEL Phase Modulated Ellipsometer is particularly suitable for the accurate characterization of high-K film thickness and interfaces with nanoscale dimensions as well as optical properties and bandgap.