应用领域:电子/电器/半导体
检测样品:铁电薄膜PbZr1-xTixO3&BA1-xSrxTiO3
检测项目:厚度,光学常数,各向异性
Spectroscopic ellipsometry is a powerful technique to characterize the thickness and optical constants of complex ferroelectric stacks with high accuracy and precision.
Specific modelling features in this study include the characterization of the anisotropic sapphire substrate, rough overlayer and layer inhomogeneity with depth.