The removal of absorption on the sample surface is very important for analyzing hydrogen in solid samples with high accuracy. Stable data can be obtained by reliably pre-treating samples. Also, adding a temperature increase analysis function allows the thermal behavior of hydrogen to be revealed with ease. We consider that the need for hydrogen analysis will increase even more in the future accompanying the development of new materials, so we expect that the temperature increase analysis function of this analyzer will be very useful. A future theme is the analysis of trace hydrogen (0.1 ppm or less) in light alloys (in particular, AI).