应用领域:纳米材料,手持/便携设备
检测样品:Intel IC,DVD
检测项目:Intel IC,DVD
参考标准:Neil Sarkar1,2, Geoffrey Lee1,2, Duncan Strathearn1,2, Mahdi Olfat1,2 and Raafat R. Mansour1,2 1University of Waterloo, Waterloo, CANADA 2ICSPI Corp., Waterloo, CANADA
This paper reports the first single-chip scanning probe microscope (sc-SPM) that is capable of simultaneously performing atomic force microscopy (AFM) and scanning thermal microscopy (SThM) without requiring any offchip scanning or sensing components. A thermalpiezoresistive resonant sensor is used to hold the tipsample interaction force constant, while a bolometer-style probe measures local heat transfer effects. The reported instrument obtains local thermal measurements of powered electrothermal MEMS devices and also achieves the first patterning results with a single-chip scanning probe instrument. Importantly, subsurface features on a 22nm CMOS chip are revealed by thermal phase imaging with the present device.