1) 鉴别总是存在的元素谱线，如C、O的谱线;2) 鉴别样品中主要元素的强谱线和有关的次强谱线;3) 鉴别剩余的弱谱线假设它们是未知元素的最强谱线.
XPS表征手册一般采用：Chastain, Jill, andRoger C. King, eds. Handbook of X-ray photoelectron spectroscopy: a reference book of standard spectra for identification and interpretation of XPS data. Eden Prairie, MN: Physical Electronics, 1995.
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