13.040.35 清洁室（无菌室）及相关受控环境 标准查询与下载

ISO 14644-1:1999 洁净室和相关控制环境 第1部分:空气洁净度分级

This part of ISO 14644 covers the classification of air cleanli-ness in cleanrooms and associated controlled environments exclusively in terms of concentration of airborne particles. Only particle populations having cumulative distributions based on threshold (lower limit) sizes ranging from 0,1 μm to 5 μm are considered for classification purposes. This part of ISO 14644 does not provide for classification of particle populations that are outside of the specified particle size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1 μm) and macroparticles (particles larger than 5 μm) may be used to quantify these populations in terms of U descriptors and M descriptors, respectively. This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, or viable nature of airborne particles. NOTE The actual distribution of particle concentrations within incre-mental size ranges normally is not predictable and typically is variable over time.

Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness

VDI 2083 Blatt 10-1998 洁净室技术 高纯度/超高纯度（HP-/UHP-）介质供应系统

High-Purity/Ultra-High-Purity (HP-/UHP-) media (chemicals and gases) are being used more and more for many production purposes. The aim is to maintain the level of cleanliness between the point of supply (P.O.S.) and the point of entry (P.O.E.) or, respectively, to accept a reduction in purity only in certain defined areas where it is permissible. The purpose of this Guideline is to summarize knowledge regarding the design, construction, operation and monitoring of HP-/UHP-media supply systems. Cleanliness refers to residual contaminants such as particles, cations, anions, TOC and other specific parameters (foreign gases, humidity etc.). There is no information provided concerning cleanliness requirement conditions as these shall be determined by the respective user according to the intended utilization.

Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems

DD ENV 1631-1996 净化间技术.净化间和空气净化设备的设计、制造和操作

Cleanroom technology. Design, construction and operation of cleanrooms and clean air devices

EN ISO 14644-3:2019 清洁室和相关受控环境.第3部分:试验方法

This part of ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. The test methods recommend test apparatus and test procedures for determining performance parameters. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this part of ISO 14644 may be used if based on agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements. This part of ISO 14644 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

Cleanrooms and associated controlled environments - Part 3: Test methods ISO 14644-3: 2005

prEN ISO 14644-18 洁净室和相关受控环境 第18部分：耗材适用性评估（ISO/DIS 14644-18:2022）

N/A

Cleanrooms and associated controlled environments - Part 18: Assessment of suitability of consumables (ISO/DIS 14644-18:2022)