31.550 标准查询与下载
共找到 31 条与 相关的标准，共 3 页
本标准规定了为保证半导体生产设施与用于生产半导体器件的设备能一起可靠运行的电磁兼容性(EMC)要求。本标准适用于生产半导体器件的设施和设备,这些设施和设备涵盖所有的设施警报、安全、通信与控制系统、工艺设备、测量设备、自动化设备以及信息技术设备。本标准不适用于集成电路的封装与功能测试所采用的设备和设施,也不适用于可能在半导体生产过程中产生的静电。
Requirements for semiconductor manufacturing facility electromagnetic compatibility
- ICS
- 31.550
- CCS
- L95
- 发布
- 2013-12-17
- 实施
- 2014-04-15
本标准给出了半导体制造设备(SME)在供应商工厂的最终装配(总装)、包装、运输以及在客户洁净室生产区的拆包和安放等特定活动指南。本标准适用于半导体制造设备、独立的组件和部件在供应商工厂的最终装配(总装)、包装和运输以及从客户装货码头/接收区到高纯和超高纯应用的洁净室生产区的转移过程。本标准不包含与环境、健康和安全(EHS)相关的特殊要求,也不适用于与晶片粒子或晶片质量(如离子污染度)相关的加工过程规范。
Guide for final assembly, packaging, transportation, unpacking, and relocation of semiconductor manufacturing equipment
- ICS
- 31.550
- CCS
- L95
- 发布
- 2013-11-12
- 实施
- 2014-04-15
本标准规定了离子束蚀刻机的术语、产品分类、技术要求、试验方法、检验规则以及包装、运输、贮存。 本标准适用于物理溅射腐蚀作用的通用离子束蚀刻机。其他专用离子束蚀刻机亦可参照执行。
General specification of ion beam etching system
- ICS
- 31.550
- CCS
- L97
- 发布
- 2012-11-05
- 实施
- 2013-02-15
本标准规定了离子注入机的本标准适用于半导体工艺庐
General specification of ion implantation equipment
- ICS
- 31.550
- CCS
- L97
- 发布
- 2012-11-05
- 实施
- 2013-02-15
General rules for enterprise equipment maintenance
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Gas pipeline integrity requirements and inspection and assessment methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Oxygen delivery pipeline integrity requirements and inspection and assessment methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Constant humidity and heat test equipment integrity requirements and inspection and evaluation methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Integrity requirements and inspection and evaluation methods for near-infrared thick film sintering furnaces
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Automatic grinding wheel dicing machine
- ICS
- 31.550
- CCS
- L95
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Acetylene pipeline integrity requirements and inspection and assessment methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Integrity requirements and inspection and assessment methods for CNC EDM machines
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
CNC coordinate grinder integrity requirements and inspection and evaluation methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Integrated circuit automatic punching and forming equipment
- ICS
- 31.550
- CCS
- L95
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Vacuum coating equipment integrity requirements and inspection and assessment methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Oil supply pipeline integrity requirements and inspection and assessment methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
CNC lathe integrity requirements and inspection and assessment methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Water supply pipeline integrity requirements and inspection and assessment methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Integrity requirements and inspection and assessment methods for CNC surface grinders
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
High temperature test equipment integrity requirements and inspection and evaluation methods
- ICS
- 31.550
- CCS
- L01
- 发布
- 2016-01-15
- 实施
- 2016-06-01
