SmartSPM Scanner and Base 扫描仪和底座
样品扫描范围:100 µm x 100 µm x 15 µm (±10 %)
Scanning type by sample XY non-linearity 0.05 %; Z non-linearity 0.05 %
噪音Noise
0.1 nm RMS in XY dimension in 200 Hz bandwidth with capacitance sensors on
0.02 nm RMS in XY dimension in 100 Hz bandwidth with capacitance sensors off
< 0.04 nm RMS Z capacitance sensor in 1000 Hz bandwidth
共振频率Resonance frequency
XY: 7 kHz (unloaded)
Z: 15 kHz (unloaded)
X, Y, Z轴向运动 movement
Digital closed loop control for X, Y, Z axes
Active elimination of XY phase lag, overshooting & ringing results in fast scanning without any dynamic image distortion
Motorized Z approach range 18 mm
样品尺寸:zei大40 x 50 mm, 15 mm厚
Sample positioning Motorized sample positioning range 5 x 5 mm
Positioning resolution 1 µm
AFM探头 Head
Laser wavelength 1300 nm, non-interfering with spectroscopic detector
Registration system noise Down to < 0.1 nm
Alignment Fully automated cantilever and photodiode alignment
Probe access Free access to the probe for additional external manipulators and probes
SPM测量模式
Contact AFM in air/(liquid optional)
Conductive AFM (optional)
Nanolithography
Semicontact AFM in air/(liquid optional)
Magnetic Force Microscopy (MFM)
Nanomanipulation
Non -contact AFM
Kelvin Probe (Surface Potential Microscopy, SKM, KPFM)
STM (optional)
Phase imaging
Capacitance and Electric Force Microscopy (EFM)
Photocurrent Mapping (optional)
Lateral Force Microscopy (LFM
Force curve measurement
Volt-ampere characteristic measurements (optional)
Force Modulation
Piezo Response Force Microscopy (PFM)
光谱模式Spectroscopy Modes
Confocal Raman, Fluorescence and Photoluminescence imaging and spectroscopy
Tip-Enhanced Fluorescence (TEFS)
Tip-Enhanced Raman Spectroscopy (TERS) in AFM, STM, and shear force modes
Near-field Optical Scanning Microscopy and Spectroscopy (NSOM/SNOM)
Conductive AFM Unit (optional)
电流范围Current range
100 fA ~ 10 µA
3 current ranges (1 nA, 100 na and 10 µA) switchable from the software
可选附件Optical Access
Capability to use simultaneously top and side plan apochromat objectives
Up to 100x, NA = 0.7 from top or side
Up to 20x and 100x simultaneously
Cloosed loop piezo objective scanner for ultra stable long term spectroscopic laser alignment
Range 20 µm x 20 µm x 15 µm
Resolution: 1 nm
光谱仪Spectrometer
Fully automated high resolution LabRAM HR Evolution micro-spectrometers,functional as stand-alone micro-Raman microscope
波长范围:50 cm-1 ~ 4000 cm -1 或低至10 cm -1 with Ultra Low Frequency (ULF) filter option
Gratings光栅
Selection of gratings from 150 g/mm to 3600 g/mm
2 gratings on computer controlled turret, kinematically mounted and easily exchangeable
选项设计:Achromatic spectrograph and achromatic coupling optics
自动化:Fully motorized, software controlled operation
检测Detection
Full range of CCD detectors and EMCCDs and InfraRed detectors: InGaAs array, single channel extended InGaAs, InSb, dTe,...
激光源Laser Sources
Wavelengths Full range of wavelengths from DUV (229 nm) to IR (up to 2.2 µm)
Typical wavelength 532 nm, 638 nm, 785 nm
自动化Automation
Fully automated laser and filter switching for up to 3 simultaneous lasers
Laser polarization selection and spectral analyzer options for all wavelengths
软件Software
Integrated software package including full featured SPM, spectrometer and data acquisition control, spectroscopic and SPM data analysis and processing suite, including spectral fitting, deconvolution and filtering, optional modules include univariate and multivariate analysis suite (PCA, MCR, HCA, DCA), particle detection and spectral search functionalities.