分辨率 | 标准模式 In-Beam SE 0.7 nm at 15 keV 1.4 nm at 1 keV In-Beam f-BSE (option) 1.6 nm at 15 keV Low Vacuum Mode: BSE (UH RESOLUTION) 2.0 nm at 30 keV LVSTD (ANALYSIS) 3.0 nm at 30 keV | Beam Deceleration mode (option): SE (BDM) 1.0 nm at 1 keV 1.2 nm at 200 eV STEM mode (option): 0.6 nm at 30 keV |
zei大视场 | 4.3 mm at WD 分析5 mm 7.0 mm at WD 30 mm | |
电子束能量 | 200 eV to 30 keV / down to 50 eV with the BDT option | |
探针电流 | 2 pA to 400 nA |
(离子光学系统)视野范围:1 mm
(离子光学系统)探针电流:<1 pA ~ 100 nA
(离子光学系统)分辨率:<2.5 nm @ 30 keV
(离子光学系统)发射源:镓液态金属离子源
(电子光学系统)视野范围:7.0 mm @ WD=30 mm
(电子光学系统)探针电流:~ 400 nA
(电子光学系统)分辨率:0.7 nm @ 15 kV
(电子光学系统)发射源:肖特基场发射源