PHI TRIFT V nano SIMS飞行时间二次离子质谱仪参数指标

　　技术指标：

　　Mass Resolution for low mass ion > 11.500M / ΔM for Si (28SiH+)

　　Mass Resolution for insulator > 10,000M / ΔM for PET (m/z 104amu)

　　Options C60 gun, cesium gun, oxygen gas gun, Hot/Cold stage, Transfer Vessel, 300mm stage, etc.

　　Standard Features

　　TRIFT质量分析器

　　30 kV LMIG with Bi, Au, or Ga emitter

　　Dual beam charge neutralization 双离子束电荷中性化

　　5 axis sample stage 5 轴样品台

　　In-situ optical viewing

　　Secondary electron detector

　　WinCadence instrument control and data reduction software package

　　Analysis chamber with four primary ion gun ports

　　350 L/秒抽速分子涡轮泵

　　Integrated bakeout facilities

　　可选附件

　　20 kV C60 pulsed ion gun

　　20 kV Ar2500+ gas cluster ion gun

　　2 kV Cs ion gun

　　5 kV gas gun (Ar/O2)

　　Oxygen flood module

　　30 kV Ga FIB gun

　　Hot/Cold sample stage module

　　Flash cooling for sample intro chamber

　　High temperature sample stage module

　　Sample transfer vessel

　　Intro chamber glove box

　　Voltage cycling sample stage module

　　Sample preparation chamber