样品台移动范围： 闭环大扫描器扫描范围90*90um

样品尺寸：zei大样品尺寸2英寸

定位检测噪声：闭环大扫描器X-Y<0.3nmRS, Z<0.1nmRMS

大范围高精度扫描探针显微镜     安捷伦5500LS
Specifications 
Stage 
- Standard vacuum chuck size: 150 mm 
- Sample thickness: up to 35 mm 
- Examination area: 150 mm x 150 mm 
- Fully motorized, controlled optics 
- Optical resolution: 2 μm 

Compatibility 
- Compatible with Agilent 5 series  family 
of products and all AC modes 
- Compatible with multi-purpose scanners 
- Compatible with CSAFM, STM, and EFM/MFM 
- Compatible with imaging in air and fluids, including but not limited to life sciences, 
electrochemistry, and corrosion applications 
- Compatible with temperature control (-30oC to 250oC) 

S c a n n e rs 
Large Scanner 
- Scanning range: 100 μm x 100 μm 
- Z range: 7 μm 
- Vertical noise: 0.5&Aring; RMS 
Small Scanner 
- Scanning range: 10 μm x 10 μm 
- Z range: 2 μm 
- Vertical noise:<0.1&Aring; RMS