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Precise, Ultra-low Noise
Closed-loop Scanner
X&Y range 90 µm
X&Y sensors<150 pm noise
Z range >15 µm (>40 µm option)
Z sensor<35 pm noise
Low-noise, High Bandwidth OpticaLever
Cantilever deflection sensing uses an inverted
configuration (incident beam off-vertical) to dramatically
reduce interference from light reflected by the sample.
Light source Low-coherence infrared (860 nm)
superluminescent diode, FDA/IEC Class 1M (Non-hazardous)
DC detector noise<10 pm
Detector bandwidth 7 MHz
High Resolution System Performance
DC height noise<20 pm
AC height noise<20 pm
Top-view Optics
Resolution Better than 5 µm
Camera Color, 5 megapixewith digitapan & zoom
Illumination
Type Köhler with aperture and field diaphragms
Source White LED fiber-coupled with SMA connector
Intensity Software controlled
Sample Stage
Sample size Up to 80 mm diameter
Sample thickness Up to 10 mm (up to 27 mm option)
(Noise measurements are quoted as the average deviation
measured with a 1 kHz bandwidth over a ful10 second
period. Specifications assume required vibration and acoustic
isolation in an appropriate laboratory environment.)
Acoustic and Vibration Isolation
Enclosure
A custom enclosure fully integrates both acoustic and
vibration isolation, part of the Infinity controller electronics,
and the accessory expansion module bay.
Vibration isolation Active vibration isolation provides
superior damping without the instability and compressed
air requirements of passive isolation tables.
Acoustic isolation Rigid, highly damped design provides
effective isolation of acoustic noise in typicalaboratories.
Ergonomics The door of the enclosure effortlessly swings
to the side to open and is reversible to accommodate different
laboratory floor plans. A smaller access window allows users
to reach into the enclosure to make adjustments.
Included Operating Modes
Contact mode; DART™ PFM; DuaAC™; DuaAC Resonance
Tracking (DART™); Electric force microscopy (EFM); Fluid
imaging; Force curve mode; Force mapping mode (force
volume); Force modulation; Frequency modulation; Kelvin
probe force microscopy (KPFM); Lateraforce mode (LFM);
Loss tangent imaging; Magnetic force microscopy (MFM);
MicroAngelo (nanolithography / nanomanipulation); Phase
imaging; Piezoresponse force microscopy (PFM); Switching
spectroscopy PFM; Tapping mode (AC mode); Tapping mode
(AC mode) with Q control; Vector PFM
OptionaOperating Modes
AM-FM Viscoelastic Mapping Mode; Band Excitation; Contact
Resonance Viscoelastic Mapping Mode; Fast Force Mapping
Mode; Instrumented nanoindentation; Conductive AFM
(CAFM) with ORCA™ and Eclipse™ mode; Current mapping
with Fast Force Mapping; ElectrochemicaStrain Microscopy
(ESM); High voltage PFM; iDrive™ (magnetically actuated
AC mode in liquid); Nanoscale Time Dependent Dielectric
Breakdown (nanoTDDB); Scanning ThermaMicroscopy
(SThM); Scanning Tunneling Microscopy (STM); Ztherm™
Modulated ThermaAnalysis
Service and Support
Warranty Fultwo-year comprehensive warranty
Support No-charge technicasupport and expert
applications support for the lifetime of the AFM
Temperature and EnvironmentaControl
PolyHeater™ – heating up to 400°C
CoolerHeater – heat or coo-30° to 120°C
Humidity Sensing Cel– sealed humidity chamber
ExternaDriving Forces
Variable Field Module 2 – magnetic fields up to 0.8 T
NanoRack™ – tensile or compressive stress up to 80 N
High Voltage Field – apply up to ±150 V
Probe Station – apply your own electric signals to samples
Controlled Gas or Liquid Environments
Closed Fluid Cel– perfuse gases or liquids
Fluid CelLite – operate in liquid without perfusion
ElectricaClosed Cel– controlled gas environment
BioHeater™ – coverslip-based heater for liquids
Petri Dish Holder – minimizes evaporation from dish
Petri Dish Heater – also heats dish up to 80°C
MicroFlow Cel– smalvolume fluid exchange
Electrochemistry Cel– also available with heating
参考：
显微镜：第三代平板式、全闭环先进扫描技术平台
1.扫描器：横向(X-Y)范围90µm×90µm;竖直(Z)范围15µm (标配型)或者40µm(选配型)
2. 噪声：垂直(Z)方向上的RMS值<0.3埃 (平均偏差 (Adev) 在0.1Hz-1kHz 带宽)
3. 样品大小：直径≤100mm, 厚度≤20mm
4.控制器:全数字化、模块化、可编程控制器，其数据处理能力仅仅受限于计算机的的内存大小(允许连续一千万点力曲线和>8190 x 8190点高密度像素成像)。允许在5MHz的速度下连续获得200万以上的数据。
5. MFP-3D可以实现全面的SPM表面表征技术，包括：
•轻敲模式(Tapping Mode AFM)-拥有Q-control控制技术
•接触模式(Contact Mode AFM)
•定量相位成像模式(Phase Imaging)
•横向力模式(laterial Force Microscopy, LFM)
•磁场力显微技术(Magnetic Force Microscopy, MFM)
•扫描隧道显微技术(Scanning Tunneling Microscopy, STM)
• 力调制(Force Modulation)
• 静电力显微技术(Electric Force Microscopy, EFM)
• 表面电势显微术(Surface Potential Microscopy)
• 动态和静态力曲线测试(Force-Distance)
•力阵列测量(Force Volume Measurement)
• 纳米压痕/划痕(Nanoindenting/Scratching)
• 超高分辨率导电显微技术(ORCA)
• 压电响应模式(Piezo Respnance mode, PR mode)