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LEXT OLS4500 纳米检测显微镜功能上的新特性：
单一扫描区域里的高分辨率观察和高精确性测量
设计便于新手操作，包括自动3D图像获取功能
3D图像获取速度大约是现有奥林巴斯各型产品的两倍
组合了光学显微镜、激光显微镜和探针显微镜功能的一体机
| LSM Section | Light Source/Detector | Light Source: 405 nm Semiconductor Laser, Detector: Photomultiplier | ||
|---|---|---|---|---|
| Total Magnification | 108x – 17,280x | |||
| Zoom | Optical Zoom: 1x – 8x | |||
| Measurement | Planar Measurement | Repeatability | 100x : 3σn-1=0.02μm、50x：3σn-1=0.04μm、20x：3σn-1=0.1μm | |
| Accuracy | Measurement Value ±2% | |||
| Height Measurement | System | Revolving Nosepiece Vertical-Drive System | ||
| Stroke | 10mm | |||
| Scale Resolution | 0.8nm | |||
| Movement Resolution | 10nm | |||
| Display Resolution | 1nm | |||
| Repeatability | 100x :σn-1= 0.012μm、50x：σn-1＝0.012μm、20x：σn-1＝0.04μm | |||
| Accuracy | 0.2+L/100 μm or Less (L=Measuring Length) | |||
| Color Observation Section | Light Source/Detector | Light Source: White LED, Detector: 1/1.8-Inch 2-Megapixel Single-Panel CCD | ||
| Zoom | Digital Zoom: 1x – 8x | |||
| Revolving Nosepiece | Motorized BF Sextuple Revolving Nosepiece | |||
| Differential Interference Contrast Unit | Differential Interference Contrast Slider: U-DICR, Polarizing Plate Unit Built-In | |||
| Objective Lens | BF Plan Semi-apochromat 5x, LEXT-Dedicated Plan Apochromat 20x, 50x, 100x | |||
| Z Focusing Unit Stroke | 76 mm | |||
| XY Stage | 100 x 100 mm (Motorized Stage) | |||
| SPM Section | Measurement mode | Contact mode, Dynamic mode, Phase mode, Current mode*, Surface Potential (KFM) mode*, Magnetic Force (MFM) mode* | ||
| Displacement detection | Optical lever system | |||
| Light source | 659 nm Semiconductor Laser | |||
| Detector | Photodetector | |||
| Max. scanning range | X-Y: Max. 30μm x 30μm、Z: Max. 4.6μm | |||
| Cantilever mount | One-touch mount using cassette-type cantilever holder. With the pre-alignment using the dedicated special tool for cantilever mounting, optical alignment is not required when replacing the cantilever | |||
| System | Total weight | Approx. 440 kg (excluding table) | ||
| Input rating | 100 - 120 V/220 - 240V, 600VA, 50/60 Hz |
* Optional
| Model | Magnification | Field of View | Working Distance (WD) | Numerical Aperture (NA) |
| MPLFLN5X | 108-864X | 2,560-320μm | 20.0mm | 0.15 |
| MPLAPON20XLEXT | 432-3,456X | 640-80μm | 1.0mm | 0.60 |
| MPLAPON50XLEXT | 1,080-8,640X | 256-32μm | 0.35mm | 0.95 |
| MPLAPON100XLEXT | 2,160-17,280X | 128-16μm | 0.35mm | 0.95 |
Application (Usage) | Product Name | Type | Chip Number | Cantilever | Probe | Material | Coating Metal | ||
| Resonance Frequency (kHz) | Spring Constant (N/m) | Height (μm) | Radius (nm) | Probe / Lever | Probe side / Reflex side | ||||
| Dynamic mode/ Phase Mode | OMCL-AC160TS-C3 | Standard silicon | 24 | 300 | 26 | 14 | 7 | Si / Si | Non / Al |
| OMCL-AC240TS-C3 | Medium-soft silicon | 24 | 70 | 2 | 14 | 7 | Si / Si | Non / Al | |
| Contact Mode | OMCL-TR800PSA-1 | Standard silicon nitride | 34 | 73 / 24 | 0.57 / 0.15 | 2.9 | 7 | SiN / SiN | Non / Au |
| Surface potential mode | OMCL-AC240TM-B3 | Silicon for electrical measurement | 18 | 70 | 2 | 14 | 15 | Si / Si | Pt/Al |
• The dimensions and mechanical properties shown above are typical values.
• Pay special attention as cantilevers are very small and subject to danger of getting could get into your eyes or be accidentally ingested.
• For information on using cantilevers for Current mode and Magnetic Force mode, please contact your Olympus dealer.
• In addition to the cantilevers shown here, a wide variety of cantilevers are available from Olympus. Please contact your Olympus dealer for details.quest a Demo