光谱重复性：<0.1cm^-1

空间分辨率：<10nm

最低波数：50cm^-1

光谱分辨率: 1cm^-1

光谱范围：50-9000cm^-1

SmartSPM Scanner and Base扫描仪和基座

样品扫描范围：100 µm x 100 µm x 15 µm (±10 %)

Scanning type by sample XY non-linearity 0.05 %; Z non-linearity 0.05 %

噪声Noise

0.1 nm RMS in XY dimension in 200 Hz bandwidth with capacitance sensors on

0.02 nm RMS in XY dimension in 100 Hz bandwidth with capacitance sensors off

< 0.04 nm RMS Z capacitance sensor in 1000 Hz bandwidth

共振频率Resonance frequency

XY 7 kHz (unloaded)

Z 15 kHz (unloaded)

X, Y, Z轴向运动 movement

Digital closed loop control for X, Y, Z axes

 WWActive elimination of XY phase lag, overshooting and ringing results in fast scanning without any dynamic image distortion

Motorized Z approach range 18 mm

样品尺寸zei大：40 x 50 mm, 15 mm厚

Sample positioning Motorized sample positioning range 5 x 5 mm

定位分辨率：1 µm

AFM 探头Head

激光波长1300 nm, non-interfering with spectroscopic detector

Alignment Fully automated cantilever and photodiode alignment

Probe access Free access to the probe for additional external manipulators and probes

SPM测量模式 Measuring Modes

Contact AFM in air/(liquid optional) 

Conductive AFM (optional) 

Nanolithography

Semicontact AFM in air/(liquid optional) 

Magnetic Force Microscopy (MFM) 

Nanomanipulation

Non contact AFM 

Kelvin Probe (Surface Potential Microscopy, SKM, KPFM) 

STM (optional)

Phase Imaging 

Capacitance and Electric Force Microscopy (EFM) 

Photocurrent Mapping (optional)

Lateral Force Microscopy (LFM) 

Force curve measurements 

Volt-ampere characteristic measurements (optional)

Force Modulation Piezo Response Force Microscopy (PFM)

光谱模式Spectroscopy Modes

Confocal Raman, Fluorescence and Photoluminescence imaging and spectroscopy

Tip-Enhanced Fluorescence (TEFS)

Tip-Enhanced Raman Spectroscopy (TERS) Near-field Optical Scanning Microscopy and Spectroscopy (NSOM/SNOM)

导电AFM单元（选项）Conductive AFM Unit (optional)

电流范围Current range

100 fA ~ 10 µA

3 current ranges (1 nA, 100 na and 10 µA) switchable from the software

可选附件Optical Access

Capability to use simultaneously top and side plan apochromat objectives

Up to 100x, NA = 0.7 from top or side

Up to 20x and 100x simultaneously

Cloosed loop piezo objective scanner for ultra stable long term spectroscopic laser alignment

范围：20 µm x 20 µm x 15 µm

分辨率: 1 nm

光谱仪Spectrometer

Fully automated XploRA Plus* compact micro-spectrometers,functional as stand-alone micro-Raman microscope

波长范围：50 cm -1  ~ 4000 cm -1

光栅：4 gratings on computer controlled turret (600, 1200, 1800 and 2400 g/mm) 

自动化：Fully motorized, software controlled operation

检测Detection

Full range of CCD detectors and EMCCDs

激光源Laser Sources

Typical wavelength 532 nm, 638 nm, 785 nm. Other wavelengths available on request.

自动化Automation

Fully automated laser and filter switching for up to 3 simultaneous lasers

Laser polarization selection and spectral analyzer options for all wavelengths

软件Software

Integrated software package including full featured SPM, spectrometer and data acquisition control, spectroscopic and SPM data analysis and processing suite, including spectral fitting, deconvolution and filtering, optional modules include univariate and multivariate analysis suite (PCA, MCR, HCA, DCA), particle detection and spectral search functionalities.

Scanning type by sample XY non-linearity 0.05 %; Z non-linearity 0.05 %