miBot纳米操纵仪参数指标

 

 
miBot纳米操纵系统的主要技术参数：
Degrees of freedom   4 (2 translations and 2 rotations)
Dimensions         body: 20.5 x 20.5 x 13.6 mm³; arm: 8.3 mm (without micro-tool)
Weight             12 g (without micro-tool)
Operating range     X and Y: typ. 5 cm (limited by cable); R:± 180°; Z: 42° (arm rotation)
Scanning range     X: 440 nm; Y: 250 nm; Z: 780 nm
Speed              X and Y: < 2.5 mm/s; Z: < 150 mrad/s
Resolution          X: 1.0 nm; Y: 0.5 nm; Z: 1.5 nm
Forces and torques   X and Y: push: 0.3 N, hold: 0.2 N;
 Z: lift: 0.7 Nm (5 g), hold:    0.9 Nm (6 g)
Temperature range    273 K to 353 K
Lowest pressure      10^-7 mbar
Electrical probing     voltage range: ± 100 V; current: < 100 mA; signal resistance: typ. 3.5 Ohm