Maximum plasma output zei大等离子体输出: 6kW (160V, 38A)
Operating pressure 操控压力: 1×10-2 to 1×10-1Pa (Ar, O2, N2 atmosphere)
Discharge gas(Ar) 放电气体(氩气): 8 to 20mL/min
Cooling water 冷却水流速: 7 to 10L/min
Beam method电子束方法 :反射电子束和辐射电子束可选selectable from Reflection-beam and Irradiation-beam