日本电子RF-340 系列匹配网络自动整合装置参数指标

• RF-340 系列匹配网络自动整合装置

• 和产生等离子体的13.56MHz高频电源组合，与负载进行匹配的自动调整装置 (匹配箱 + 控制器) 。

特点：

An automatic matching device to match the load to the 13.56 MHz RF power supply for plasma generation..
一种自动匹配装置匹配负载到13.56兆赫的射频等离子体电源产生的。
Matching box Controller.
匹配箱控制器。

Functions.功能
Preset (8 point). 预设（8点）。
Records the settings of each of the variable capacitors for the points that have been matched..记录已经匹配..每个点的可变电容器的设置
Auto-preset.自动预设。
Auto control driving the variable capacitors to the preset settings when output is zero, and then outputting the RF.自动控制驱动可变电容器的预置设置时输出为零，然后输出射频。
Auto-delay.自动延时。
No immediate reaction to sudden changes in the load, such as arcing, with automatic operation after a specified#12288;period of time has elapsed..在负载突然变化没有直接的反应，如电弧，指定# 12288后自动运行；时间已经过去了。
Variable capacitor position display.可变电容器的位置显示。
Variable capacitor drive range setting.可变电容器的驱动范围设定。
Control of the variable capacitor drive range setting during automatic operation.可变电容器的驱动范围控制设置在自动操作。
Vdc display.VDC显示。
Vdc meter relay.直流电压表继电器。
Vdc stabilization control.VDC稳定控制。
Vpp display.VPP的显示。
Vpp meter relay.VPP米接力。
Load impedance display.负载阻抗显示。
When matching is obtained, the plasma impedance is calculated and displayed.当获得匹配，等离子体阻抗的计算和显示。
CE compliant #65288;excluding some devices#65289;.CE标准# 65288；排除某些设备# 65289；。

Features特点

RF-340 series Matching Network

An automatic matching device to match the load to the 13.56 MHz RF power supply for plasma generation. Matching box + Controller

Functions功能

Preset (8 point)

Records the settings of each of the variable capacitors for the points that have been matched.

Auto-preset

Auto control driving the variable capacitors to the preset settings when output is zero, and then outputting the RF

Auto-delay

No immediate reaction to sudden changes in the load, such as arcing, with automatic operation after a specified　period of time has elapsed.

Variable capacitor position display

Variable capacitor drive range setting

Control of the variable capacitor drive range setting during automatic operation

Vdc display

Vdc meter relay

Vdc stabilization control

Vpp display

Vpp meter relay

Load impedance display

When matching is obtained, the plasma impedance is calculated and displayed

CE compliant （excluding some devices）

技术规格：