产品描述
RD3
Resist Developer RD3 is a water-based, alkaline resist developer for application with Positive
Resist PR1 series.
Properties
♦ Principal solvent: water
♦ Alkaline metal compound (%): 1.40-1.60
♦ Appearance: clear liquid
♦ Specific gravity at 25°C (g/cm³): 0.99-1.01
♦ Guaranteed shelf life at 25°C storage (years): 3
Processing
1 Pour the developer solution into the resist development tank.
2 Establish that the temperature of the developer is correct.
3 Develop the resist by immersion or spraying, following the instructions in the Processing
section of the Technical Information for the resist.
4 Rinse the substrate in deionized water until the water resistivity reaches the prescribed limit.
