产品描述
EPi-Ready Polished Sapphire Substrate
蓝宝石衬底/基片, 开盒即用外延生长级抛光
| Crystal Materials 晶体材料 | 99.995% High Purity, 2-3 Grade Monocrystalline Al2O3, 高纯单晶 | ||
| Wafer Surface Orientation 晶向 | C-axis(0001) offset to M (1-100) / A (11-20) 0.2°±0.05° / 0.3°±0.1° / ±0.25° | ||
| Diameter 直径 | 50.8mm ± 0.1mm / 76.2mm ± 0.25mm / 100.0 ± 0.40mm / 125.0 ± 0.3mm / 150.0 ± 0.3mm | ||
| Thickness 厚度 | 330um ± 15um | 430um ± 10um | 650um ± 10um |
| Major Flat 定位边 | A-axis (1 1-2 0) ± 0.2° 方向 | ||
| Major Flat Length | 16.0mm ± 1.0mm / 22.0mm ± 1.0mm / 32.5 ± 1.0mm / 47.5 ± 2.5mm 长度 | ||
| Minor 次定位边 | None 无 | ||
| Front Surface Finish 正面状态 | Epi-ready polished 外延生长级抛光, Ra< 0.2nm | ||
| Back Surface 反面 | SSP 单面: Fine ground 精研磨, Ra 0.4 to 1.0 um; DSP 双面: Polished 抛光 | ||
| Edge condition 边 | Edge defects not to exceed SEMI M3-91, 符合 SEMI M3-91 | ||
| TTV 厚度变化 | <15um | <10um | <10um |
| BOW 挠度 | <15um | <10um | <10um |
| Warp 弯曲 | <15um | <10um | <10um |
| Bubble & Color 微气孔及色泽 | None by visual inspection in intensive light 强光灯下不可见 | ||
| Ground Boundary 晶界 | None by visual inspection in fluorescent light 日光灯下不可见 | ||
| Cleanliness 清洗 | Free visible contamination 无见任何可见杂物 | ||
| Packaging 包装 | Packaged in a class 100 clean room environment, in cassettes of 25pcs or single fluroware, under a nitrogen atmosphere. 100级洁净室真空冲氮包装,25片卡盒/单片币式 | ||
| Note 备注 | R-plane (1-1 0 2), A-plane (1 1-2 0 ), and M-plane(1-1 0 0) are available; Customer's specification not listed above is also available upon request. 同时我们生产R-面,A-面和M-面蓝宝石基片;我们接受客户的特殊规格的定货 | ||
