产品描述
PSS Sapphire Substrate, EPi-Ready Polished
图形蓝宝石基片, 外延生长级抛光
| Crystal Materials 晶体材料 | 99.995% High Purity, 2-3 Grade Monocrystalline Al2O3, 高纯单晶 |
| Wafer Surface Orientation 晶向 | C-axis(0001) offset to M(1-100) 0.2°±0.1°, 0.0°±0.1° to A (1 1-2 0) |
| Diameter 直径 | 50.8mm ± 0.1mm |
| Thickness 厚度 | 430um ± 10um |
| Major Flat 定位边 | A-axis (1 1-2 0) ± 0.2° 方向 |
| Major Flat Length | 16.0mm ± 1.0mm 长度 |
| Minor 次定位边 | None 无 |
| Front Surface Finish 正面状态 | Pattern Feature 图形特征: hexagonal 六角形, 3.00±0.25um diameter 直径 x 1.5±0.25um depth 深度; spacing 间距2-3um; Epi-ready polished 外延生长级抛光, Ra< 0.2nm |
| Back Surface 反面 | SSP 单面: Fine ground 精研磨, Ra 0.4 to 1.0 um; DSP 双面: Polished 抛光 |
| Edge condition 边 | Edge defects not to exceed SEMI M3-91, 符合 SEMI M3-91 |
| Flatness,平整度 | TTV 厚度变化<10um, BOW 挠度<10um, Warp 弯曲<10um |
| Bubble & Color 微气孔及色泽 | None by visual inspection in intensive light 强光灯下不可见 |
| Ground Boundary 晶界 | None by visual inspection in fluorescent light 日光灯下不可见 |
| Cleanliness 清洗 | Free visible contamination 无见任何可见杂物 |
| Packaging 包装 | Packaged in a class 100 clean room environment, in cassettes of 25pcs or single fluroware, under a nitrogen atmosphere. 100级洁净室真空冲氮包装,25片卡盒/单片币式 |
| Note 备注 | R-plane (1-1 0 2), A-plane (1 1-2 0 ), and M-plane(1-1 0 0) are available; Customer's specification not listed above is also available upon request. 同时我们生产R-面,A-面和M-面蓝宝石基片;我们接受客户的特殊规格的定货 |
