RR5
Resist Remover RR5 is a stripping solution designed to remove photoresist from the surface of a
substrate.
Properties
♦ Principal solvent: proprietary solvent mixture
♦ Melting temperature (°C): -20
♦ Appearance: clear liquid
♦ Specific gravity at 25°C (g/cm³): >1
♦ Guaranteed shelf life at 25°C storage (years): 3
Processing
1 Pour the solution into a resist stripping tank.
2 RR5 strips NR4-, NR9- and PR1-series resists at room temperature. To strip NR1-, NR5- and
NR7-series resists, RR5 needs to be heated to 100°C under an exhaust hood.
3 Place the resist coated substrate in RR5 for 15 minutes.
4 Rinse the substrate with deionized water until the water resistivity reaches the prescribed
limit.