美国SVT原子吸收流量监测控制系统应用于：
MBE Growth (III/V, II/VI,) 
Sputter Deposition (High Tc Superconductors, Dielectrics, Optical Coatings) 
Nitriding and Nitrogen Doping 
Oxidation and Oxygen Doping 


技术参数：
SVT Associates has developed the unique AccuFlux Process Controller for real-time measurement and monitoring of atomic fluxes in a thin film deposition process. Based on Atomic Absorption Spectroscopy the system measures the atomic vapor flux density originating from solid and gas sources. A proprietary optical design and absolute material selectivity ensure multi-flux measurements with high accuracy for excellent composition control better than 0.3%.

主要特点：
应用于各种蒸镀设备
超高精度监测流量
同时监测多种气体
控制生长速率可到0.0002nm
流量控制稳定精确