Phase Modulated Spectroscopic Ellipsometry is an excellent technique for the highly accurate characterization of complete OLED stacks. The technique allows the determination of film thickness, optical properties and the effect of dopants to the active layers.

For very high throughput applicatios where large area flat panels are to be charactrised in a production environment the Jobin Yvon FF-1000 ellipsometeer has a fully automated sample stage able to accept samples up to 1000 mm× 1000 mm. This accurate, automated thin film metrology tool delivrs both unique performance and proven reliability for on-line quality control of production processes.