使用椭圆偏振光谱仪表征封装应用中的势垒层

应用领域:其他

检测样品:封装应用中的势垒层

检测项目:过程控制

方案摘要

The UVISEL FUV combines high-speed acquisition, high accuracy and versatility with a straightforward recipe mode for automated tasks. This powerful combination allows the UVISEL spectroscopic ellipsometer to be used for monitoring the production of barrier coatings for packaging applications in real time.

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