应用领域:电子/电器/半导体
检测样品:ZnO薄膜
检测项目:Al含量,膜厚度
The sensitivity of Spectroscopic Ellipsometry is such that characterisation of different doping concentrations of Al in ZnO is possible. Further to this the UVISEL PMSE allows the highest sensitivity and precision of the ellipsometric angles across the full range [0°, 360°], even when ' is close to 0°, and this performance is essential when characterising thin transparent films