应用领域:电子/电器/半导体
检测样品:ZrO2薄膜
检测项目:膜厚度,光学常数,组成
The deposition method and conditions used for preparation of the ZrO films have resulted in generation of an inhomogeneous porous layer. Owing to the sensitivity of the UVISEL Spectroscopic Phase Modulated Ellipsometer and software it is possible to detect this layer, and to characterise its composition while at the same time measuring the film thicknesses and optical constants.