赛默飞Metrios AX TEM半导体计量透射电镜参数指标

Technical highlights

Source

• Ultra-stable, high-brightness Schottky field emission gun (X-FEG) and a flexible high-tension range from 300-200 kV (60-200 kV suitable for automation)

Optical column and correctors

• Three-lens condenser system with indicators for convergence angle and size of illuminated area; allows for quantitative measurement of electron dose and illumination conditions

• New S-CORR probe corrector provides sub-Angstrom imaging resolution at 60 kV as specification and an order of magnitude improvement in optical stability; the S-CORR corrector simultaneously corrects A5 for all accelerating voltages

• New CEOS Auto S-CORR Alignment Software makes probe corrector tuning easy, fast and fully automated up to and including 4th order aberrations

• Patented mechanical stacking of column modules minimizes instabilities caused by excessive deflector excitations

• Constant power lenses, designed for improved thermal stability in mode switches, minimize image drift

• Low hysteresis design minimizes crosstalk between optical components for enhanced reproducibility

• Symmetric X-TWIN objective lens with a wide pole piece gap of 5.4 mm for “space to do more,” to accommodate special holders such as heating, cooling and STM/AFM holders

• Objective aperture in the back focal plane of the objective lens for optimum TEM dark-field application work

• Automatic apertures for remote control operation and reproducible recall of aperture positions during aperture change

• Rotation-free imaging for easy operation and a clear orientation relationship between imaging and diffraction 

• Sub-Angstrom resolution for all accelerating voltages (60-200 kV) with low specimen drift (manual)

• Integrated Faraday cup and calibrated fluscreen current readout is linear over whole beam current range

Stage

• Computerized 5-axis, ultra-stable specimen piezo stage for accurate recall of stored positions and tracking of the areas visited during sample navigation

• The piezo stage allows for movements as fine as 20 pm for centering of feature of interest in the field of view

• Tilt range ±40 degrees for analytical double tilt holder to orient the maximum amount of zone axes of one crystal in a polycrystalline material. With the tomography holder, ±75 degrees minimize the missing wedge in 3D reconstructions.

• Linear drift compensation provided by the piezo stage can be used to mitigate limitations caused by thermal drift, which is unavoidable during in situ heating or cooling experiments

Analytics and detectors

• Dual-X EDS, integrated software, and the Gatan Ultrafast EELS/DualEELS options together provide up to 1000 sp/s of simultaneous EDS and EELS data

• Analytics for live peak identification and background fitting during ultra-fast EDS acquisition

• Symmetric EDS detector design allows for combined tomographic EDS

EDS detector portfolio

• EDS quantification using Thermo Scientific Velox™ Software (featuring dynamic correction of holder shadowing as a function of tilt) or ESPRIT Software

• Dual-X Detector: symmetric, windowless EDX detector system with high solid angle and throughput

• Output count rate: up to 260 kcps

• Energy resolution:

– 130 eV for Mn-Ka and 10 kcps (output)

–<140 eV for Mn-Ka and 100 kcps (output)

• 1.8 srad solid angle

• High P/B ratio (Fiori number) > 2000

• In-hole performance (<1% hole counts)

• System background in EDS (<2.5% spurious peaks)

Available detector options

• HAADF detector (standard)

• On-axis solid state, 8 segmented BF and ADF detectors (16 segments in total) (standard)

• Thermo Scientific™ Ceta™ 16M Camera (optionally with speed enhancement)

• Gatan OneView/OneView IS Cameras

• Gatan Energy Filter Continuum Series

• Electron microscope pixel array detector (EMPAD) (stand-alone)

Software

• Recipe Editor Software is a graphical programming language toolkit for building automation recipes

• Smart Automation Software allows operators to set up automation routines in<4 hours for selected workflows

• Smart Alignments Software maintains application-critical microscope alignments and ensures high quality data, 

preventing productivity loss due to runtime errors or collection of out-of-spec data

• The microscope data viewer is a database that collects, organizes, and displays all imaging, EDS and metrology data through a web browser. Smart alignments are also displayed through this portal.

• Differential phase contrast (DPC) STEM technique enables live measurements of intrinsic magnetic and electric fields

• Integrated DPC (iDPC) software for increased imaging contrast in STEM on materials across the whole periodic table

• Low-dose technique expands materials science use cases and replaces annular bright field as the technique of choice for 

light elements

• OptiSTEM+ Software for single-click correction of 1st and 2nd order probe forming aberrations; delivers enhanced STEM resolution to all users on our probe-corrected tools

• Fully digital system for remote-controlled operation using the SmartCam suite

Available holders

• Single-tilt holder

• Double-tilt holder

• Tomography holder

• Thermo Scientific in situ holders

Please ask for a list of functional holders

Other features

• Environmental enclosure to relax the acoustic and room temperature variation requirements

• Cold trap design for up to four days of operation, maximizing uptime

Installation requirements

Please contact your sales representative for a complete list of pre-installation requirements

技术亮点

发射枪

•超稳定、高亮度肖特基场发射枪（X-FEG）和300-200 kV（60-200 kV适用于自动化）的灵活高压范围

光柱和校正器

•三透镜聚光系统，带会聚角和照明区域大小指示器；允许对电子剂量和照明条件进行定量测量

•新型S-CORR探头校正器按规范提供60 kV的亚埃成像分辨率，光学稳定性提高了一个数量级；S-CORR校正器同时针对所有加速电压校正A5

•新的CEOS Auto S-CORR校准软件使探针校正器的调整变得简单、快速且完全自动化，最高可达4阶像差（包括4阶像差）

•柱模块的专利机械堆叠最大限度地减少了过度偏转器激励引起的不稳定性

•恒定功率镜头，旨在提高模式开关的热稳定性，最大限度地减少图像漂移

•低磁滞设计最大限度地减少了光学组件之间的串扰，从而增强了再现性

•对称X-TWIN物镜，具有5.4 mm的宽极片间隙，用于“做更多事情的空间”，以容纳特殊支架，如加热、冷却和STM/AM支架

•物镜后焦平面上的物镜孔径，用于最佳TEM暗场应用工作

•用于远程控制操作的自动光圈，以及在光圈变化期间可重复调用光圈位置

•无旋转成像，操作简便，成像和衍射之间的方向关系清晰

•具有低样本漂移的所有加速电压（60-200 kV）的亚埃分辨率（手动）

•集成法拉第杯和校准的冲洗屏电流读数在整个电子束电流范围内是线性的

样品台

•计算机化的5轴超稳定样本压电载物台，用于准确回忆存储位置并跟踪样本导航期间访问的区域

•压电载物台允许精确到20 pm的移动，以便将感兴趣的特征集中在视野中

•倾斜范围±40度，用于分析双倾斜支架，以确定多晶材料中一个晶体的最大区轴方向。使用断层扫描支架，±75度可最大限度地减少3D重建中缺失的楔块。

•压电级提供的线性漂移补偿可用于减轻热漂移引起的限制，这在原位加热或冷却实验中是不可避免的

分析和检测器

•Dual-X EDS、集成软件和Gatan超快EELS/DualEELS选项一起提供高达1000 sp/s的EDS和EELS数据

•分析超快EDS采集过程中的实时峰值识别和背景拟合

•对称EDS探测器设计允许组合断层EDS

EDS探测器组合

•使用Thermo Scientific Velox进行EDS量化™ 软件（具有作为倾斜函数的支架阴影的动态校正）或ESPRIT软件

•双X探测器：对称、无窗EDX探测器系统，具有高立体角和吞吐量

•输出计数率：高达260 kcps

•能量分辨率：

–130 eV，Mn Ka和10 kcps（输出）

–对于Mn Ka和100 kcps（输出），<140 eV

•1.8 srad立体角

•高P/B比率（Fiori数）>2000

•孔内性能（<1%孔数）

•EDS中的系统背景（杂散峰值<2.5%）

可用的检测器选项

•HAADF探测器（标准）

•轴上固态，8个分段BF和ADF探测器（共16个分段）（标准）

•赛默科学™ Ceta™ 1600万摄像头（可选速度增强功能）

•Gatan OneView/OneView IS摄像头

•Gatan能量过滤器连续体系列

•电子显微镜像素阵列检测器（EMPAD）（独立）

软件

•配方编辑器软件是一个用于构建自动化配方的图形编程语言工具包

•智能自动化软件允许操作员在不到4小时的时间内为选定的工作流程设置自动化例程

•Smart Alignments软件可维护应用关键型显微镜对准，并确保高质量的数据，防止由于运行时错误或收集不符合规范的数据而导致的生产力损失

•显微镜数据查看器是一个通过网络浏览器收集、组织和显示所有成像、EDS和计量数据的数据库。智能路线也通过此门户显示。

•差分相位对比（DPC）STEM技术能够实时测量本征磁场和电场

•集成的DPC（iDPC）软件，用于提高整个元素周期表中材料的STEM成像对比度

•低剂量技术扩展了材料科学的使用范围，并取代环形亮场成为

轻元素

•OptiSTEM+软件，用于一阶和二阶探针形成像差的单击校正；在我们的探针校正工具上为所有用户提供增强的STEM分辨率

•使用SmartCam套件进行远程控制操作的全数字系统

可用支架

•单倾斜支架

•双倾斜支架

•层析成像支架

•Thermo Scientific现场支架

其他功能

•环境封闭，以放松声学和室温变化要求

•冷阱设计，最多可运行四天，最大限度地延长正常运行时间

安装要求

请联系您的销售代表以获取预安装要求的完整列表