特殊设计:
Table supported on a seismic block, isolated from chamber supports.
工作桌面区别于腔体,单独固定在一个防震区块上。
4 shroud zones with independent temperature control.
四个区域拥有单独的温度控制模块。
TCU and vacuum pumps are in separated machinery room.
温度控制模块和真空泵在不同的房间