OPC-60A

锇膜镀膜仪Osmium   Plasma Coater

台

OPC-80T

锇膜镀膜仪Osmium   Plasma Coater

台

腔室

Hard glass chamber:   160mm(OD)x105mm(H)

Hard glass chamber:   120mm(OD)x73mm(H)

膜厚

a few - few dozen nm

a few - few dozen nm

样品台

Two holes for 10mm dia SEM holder,   Two holes for 15mm dia SEM holder, and one hole for 32mm dia SEM holder

Seven holes for 10mm dia SEM   holder, Four holes for 15mm dia SEM holder, or One hole for 32mm dia SEM   holder

镀膜种类

Osmium(OsO4)
  C10H8(Naphthalene)

Osmium

锇储存

Detachable, sealing up, has view port, is   able to be stored in a freezer

Detachable, sealing up, has view port, is   able to be stored in a freezer

Detachable, has view port

气体输入

OsO4 ampoule is split in an OsO4   reservoir and its sublimated gas is introduced into gas reactor chamber.
  C10H8 is in an C10H8 reservoir and its sublimated gas is introduced into gas   reactor chamber.

OsO4 ampoule is split in an OsO4   reservoir and its subkimated gas is introduced into gas reactor chamber.

电源

AC100V 2A 200W(50/60Hz)

AC100V 2A 200W(50/60Hz)

尺寸

450(w)x410(D)x390(H)mm

450(w)x350(D)x330(H)mm

重量

Approx. 30kg

Approx. 20kg