采用电阻式蒸发原理,利用大电流加热钼舟或钨丝蓝或固定支架上的镀膜材料,使其在高真空下蒸发,沉积在被镀样品上以获得zei佳镀膜效果。 适用范围: 电子显微镜样品制备和清洁光栏,以及科研、教学和企业中的实验活动、工艺试验。 使用了大抽速、高压缩比、自然风冷却复合分子泵,确保喷镀时能够迅速抽掉蒸发源和样品放出的气体;正常情况下喷镀室内极少有油蒸气回流,非常清洁。
配有高位定性的飞跃真空泵,涡轮分子泵
ETD-100AF
is a high vacuum thermal evaporation type small film coating machine.
By using the principle of resistance evaporation, the coating material
on the molybdenum boat or tungsten blue or fixed bracket is heated by
high current, so that it is evaporated under high vacuum and deposited
on the plated sample to obtain the best coating effect.
Scope of application:
Sample preparation and cleaning of optical microscope, as well as
scientific research, teaching and experimental activities and process
tests in enterprises.
A compound molecular pump with large pumping speed, high compression
ratio and natural wind cooling is used to ensure that the evaporation
source and the gas from the sample can be removed quickly when the spray
plating is sprayed.