返回 TESCAN S9000 超高分... 返回 TESCAN S9000 超高分... 
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| Resolution: | Standard mode: In-Beam SE 0.7 nm at 15 keV 1.4 nm at 1 keV In-Beam f-BSE (option) 1.6 nm at 15 keV Low Vacuum Mode: BSE (UH RESOLUTION) 2.0 nm at 30 keV LVSTD (ANALYSIS) 3.0 nm at 30 keV | Beam Deceleration mode (option): SE (BDM) 1.0 nm at 1 keV 1.2 nm at 200 eV STEM mode (option): 0.6 nm at 30 keV |
| Maximum Field of View: | 4.3 mm at WD Analytical 5 mm 7.0 mm at WD 30 mm | |
| Electron Beam Energy: | 200 eV to 30 keV / down to 50 eV with the BDT option | |
| Probe Current: | 2 pA to 400 nA |