OXFORD Ultim Extreme EDS 能谱仪参数指标

• Ultimate spatial resolution for SEM-EDS

• Sub 10nm element characterisation in the FEG-SEM
  
  

• Surface science sensitivity

• Characterise surfaces in the SEM
  
  

• Materials discrimination at the lowest kV

• Down to 1kV materials characterisation
  
  

• Fastest and most accurate nano-characterisation

• Fast collection, real-time data processing from a bulk sample

• Extreme light element sensitivity

• New levels of detectability for elements such as lithium, nitrogen and oxygen

驱动系统的终极空间分辨率

FEG-SEM 中的亚10nm 元素特征

表面科学灵敏度

在扫描电镜中描述曲面

zei低千伏时的材料歧视

可达1kV 材料的特性

zei快、zei精确的纳米特性

从批量采样中快速收集实时数据处理

极高的光元件灵敏度

锂、氮和氧等元素的可探测性达到新水平