技术参数
1. 光谱范围:450-1000 nm
2. 多种微光斑自动选择
3. zl光斑可视技术,可观测任何样品表面
4. 自动样品台尺寸:200mmX200mm;XYZ方向自动调节; Z轴高度>35mm
5. 70度角入射
6. CCD探测器
Spectral range: 440-1000 nm
Spot sizes: automatic selection 500x500 µm; 250x500 µm; 250x250 µm; 70x250 µm; 100x100 µm; 50x60 µm; 25x60 µm
Detection: CCD – Resolution: 2nm
sample stage: vacuum chucks, z height 40 mm
Sample viewing: CCD camera - Field of view: 1.33x1 mm – Resolution: 10µm
Goniometer: Fixed at 70° - Possible set up at 66° and 61.5°
Numerous accessories
Measurement time: <2s, typical 5s
Accuracy: NIST 100nm d ± 4Å, n(632.8nm) ± 0.002
Repeatability: NIST 15nm ± 0.2 Å