基本参数
波长分辨率优于0.1nm
全波长范围扫描模式Fixed Sampling Adaptive Sampling
自动优化数据采集氮气吹扫Unique sealed design for rapid purge and minimal c
波长范围170 nm to 900nmnm
波长精度±0.1nm (170nm – 400nm)
焦距见详情mm
加工定制是狭缝尺寸0 to 16nm (0.1nm递增)
光源 Light Source: 150W Xe (air cooled) 氙灯
波长范围 Standard Wavelength Range: <170 nm to 900nm
波长准确度 Wavelength Accuracy: ±0.1nm (170nm – 400nm) ± 0.5nm (400nm – 900nm)
波长分辨率Wavelength Resolution: 优于0.1nm
全波长范围光谱狭缝带宽 Slit Bandwidth: 0 to >16nm (in 0.1nm increments)
扫描模式 Scanning Modes: Fixed Sampling, Adaptive Sampling
自动优化数据采集氮气吹扫 Nitrogen Purging: Unique sealed design for rapid purge and minimal consumption
启动时间 Startup:<15mins
吹扫气体用量 Purge Gas Requirements: 5 l/min (全波长), 2 l/min > 200nm