HORIBA Smart SE智能...
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技术参数：

· 光谱范围：450-1000nm

· 多种微光斑自动选择

· zl光斑可视技术，可观测任何样品表面

· CCD探测器

· 自动样品台尺寸：200mmX200mm；XYZ方向

· 自动调节; Z轴高度>35mm


Standard Configurations
Spectra range:450nm to 1000nm
Spectra resolutionBetter than 3nm
Light sourceCombined Halogen and Blue LED
Measurement time<1sec to 10 sec
Beam size

75µm * 150µm, 100µm * 250µm,

100µm * 500µm, 150µm * 150µm,

250µm * 250µm, 250µm * 500µm,

500µm*500µm

Angle of incidence450 to 900 by step of 50
Sample sizeUp to 200mm
Sample alignmentManual 17mm height adjustement and tilt
Dimensions100cm * 46cm * 23cm(W*H*D)
Performances
Straight-through air accuracyΨ=450±0.050 Δ=00±0.20
Thickness accuracy on 1000 Å Oxide0.04%
Thickness repeatability on 1000 Å Oxide±0.02%

 

 

Options

  • Automated angle of incidence from 450 to 900 by step of 0.010

  • Motorized stage for 200mm and 300mm sample sizes

  • In-situ adjustable flanges for mounting on process chamber

  • Heating and cooling stages

  • Liquid and electrochemical cells

  • Cross hair auto-collimation system


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