主要规格
SCAN 10 | SCAN 15 | SCAN 20 | |
Focal length 焦距 | 80 mm | 50 mm | 30 mm |
Working distance 工作距离 | 60 mm | 45 mm | 20 mm |
Field 扫描范围 | 20 × 20 mm | 7 × 7 mm | 2 × 2 mm |
Angle of attack max 最大迎角 | +/- 5° | +/- 7° | +/- 10° |
Hole or trench maximum 最大孔或沟槽 | 1000 μm | 500 μm | 200 μm |
Hole or trench minimum 最小孔或沟槽 | 90 μm | 60 μm | 40 μm |
Rotation 转速 | Adjustable from 1000 to 30,000 rpm 1000到30,000 rpm可调 | ||
Available Wavelengths 适用波长 | 343 nm | 515 nm | 1030 nm |
Dimensions (W × D × H) | 35 × 29 × 18 cm |