travel

mm

100

200

300

400

500

1000

1500

load capacity

kg

>65

>65

>65

>65

>65

>65

>65

accuracy

μm

±0.3

±0.5

±0.5

±0.5

±0.5

±1.0

±1.0

repeatability

μm

±0.1

±0.15

±0.15

±0.2

±0.2

±0.4

±0.4

flatness

μm

±0.2

±0.4

±0.5

±1

±1.5

±3

±5

pitch

μrad

±4

±8

±12

±13

±14

±29

±39

roll

μrad

±4

±8

±12

±13

±14

±29

±39

yaw

μrad

±4

±8

±12

±13

±14

±29

±39