二维MEMS扫描镜参数指标

镜面大小: 0.8mm,   1.2mm, 1.6mm, 20.mm and 2.4mm diameter always in stock

镜面大小: 2.0, 2.4, 3.0, 3.6, 4.2, and 5.0mm diameter in stock, larger   possible in special orders.

点到点驱动模式最大倾斜角度: -6° to +6° mechanical each   axis, varies with design type.

  点到点驱动模式最大倾斜角度: -6° to +6° mechanical on each axis, varies with design type.

共振驱动模式最大倾斜角度： -7° to +7° mechanical

共振驱动模式最大倾斜角度: -7° to +7° mechanical, varies with design type.

• 表面粗糙度: <10 nm rms

• 驱动方式:静电驱动

• 镜面曲率半径: >5 m

• 镜面镀膜: Aluminum or Gold

• 位置重复精度: better than 0.0005° (500        micro-degrees) at room temperature

• 工作温度: -40°C to 105°C

• 光学窗口: Anti-reflection coated fused silica        windows.

• 光学损伤阈值: up to 2W any mirror, any wavelength.        Above 2W depends on mirror size, coating, and wavelength. E.g. 3W CW        blue or green on a 2mm or larger mirror .

• 初始共振旋转频率: >3 kHz for both axes for small        mirror sizes, >1.2kHz for 2.0mm size, etc.